Wafer Level Window Filter [Individual Package]
Introduction
Using MEMS process, wafer level metallization and ROE/DOE, double-sided lens/cavity structure formation.
Wafer level ROE/DOE, LWP or AR optical coating over double-sided structure
Metallization Process for Packaging [Metals: Cr, Ni, Ti, Au, Ag, Sn]
Wafer level ROE/DOE, LWP or AR optical coating over double-sided structure
Metallization Process for Packaging [Metals: Cr, Ni, Ti, Au, Ag, Sn]
Wafer Level
Metallization
Wafer Level
ROE [Refractive Optics Elements]
 |
 |
| Square type Lens | Hexagonal type Lens |
| Lens Diameter |
§100um~4mm
|
| Lens Height |
§< 250um
|
| Array (Dicing type) |
§Hexagonal
§Square
|
Wafer Level
DOE [Diffractive Optics Elements]
| Lens step |
§4~8step
|
| Step Height |
§> 0.5um
|
| Step width |
§> 2um
|
| Array (Dicing type) |
§Hexagonal
§Square
|
Wafer Level
double side structure
LWP Optical coating
AR Optical coating
